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檢測用的儀器與檢測定位精度所用的相同。一般檢測方法是在靠近各坐標行程中點及兩端的任意三個位置進行測量，每個位置用快速移動定位，在相同條件下重復7次定位，測出停止位置數值并求出讀數最大差值。以三個位置中最大一個差值的二分之一，附上正負符號，作為該坐標的重復定位精度，它是反映軸運動精度穩定性的最基本指標。
3、直線運動的原點返回精度檢測
原點返回精度，實質上是該坐標軸上一個特殊點的重復定位精度，因此它的檢測方法完全與重復定位精度相同。
4、直線運動的反向誤差檢測
直線運動的反向誤差，也叫失動量，它包括該坐標軸進給傳動鏈上驅動部位(如伺服電動機、伺趿液壓馬達和步進電動機等)的反向死區，各機械運動傳動副的反向間隙和彈性變形等誤差的綜合反映。誤差越大，則定位精度和重復定位精度也越低。
反向誤差的檢測方法是在所測坐標軸的行程內，預先向正向或反向移動一個距離并以此停止位置為基準，再在同一方向給予一定移動指令值，使之移動一段距離，然后再往相反方向移動相同的距離，測量停止位置與基準位置之差。在靠近行程的中點及兩端的三個位置分別進行多次測定(一般為7次)，求出各個位置上的平均值，以所得平均值中的最大值為反向誤差值。
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