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 此生產流程有三個工段：壓縮吸附工段、冷凍液化工段、精餾儲存工段。常壓、低于40℃的原料氣，經過一次分水和三級壓縮,氣體壓力增加到3.0Mpa，進入第二分水器進一步分水，再進入干燥器干燥，之后工業級二氧化碳原料氣進入預冷器，食品級二氧化碳經吸附床吸附后也進入預冷器。經預冷器冷卻后，原料二氧化碳氣體溫度降到24℃以下。以上為壓縮吸附工段，下一道工序為冷凍液化工段。經此工段冷凍液化后的原料二氧化碳溫度降到-12℃，之后進入精餾儲存工段。工業級原料二氧化碳經閃蒸罐后，直接進入工業級二氧化碳成品貯存罐，食品級原料二氧化碳則需經過精餾塔精餾，成為高純度的食品級成品。

2．系統功能和結構
2．1 監控系統的功能：
1）工藝流程的現場控制。此生產線共有14個控制回路。其中，11個單回路、三個串級控制回路。包括2個壓力控制、7個液位控制、4個溫度控制、1個流量控制。
2） 遠程控制。控制臺實現每個回路的軟手動/自動兩種控制方式的選定和每路控制參數的設定。
3）流程顯示。實現整個生產線各工段的實時監視界面。
4）趨勢顯示。生產流程中的實時數據和歷史數據的趨勢曲線顯示。
5）數據存檔和報表。實時數據的存檔，歷史數據的查詢及報表打印。
6）故障報警。對生產過程中的故障進行及時報警及相應的故障提示信息。
7）雙機熱備份運行，確保生產線的無間斷安全生產。

2．2 監控系統的結構 
目前監控系統通常采用RS-485完成現場和上位機的通信，但這種方式沒有媒體訪問控制(MAC)機制，通信能力和資源共享能力差。而使用IEC61158的現場總線，顯然對于這個小型系統來說是不經濟的。以太網有完整的通信協議，能實現多種網絡功能，但是它是面向商業的網絡，所以在實時性和抗干擾能力等方面較差。綜合考慮二者的特點和系統實現的性能價格比，本系統應用以太網實現遠程通信和資源共享，也便于系統的擴展和公司的信息化管理；同時，借鑒了FCS的系統設計思想，將控制下放到現場完成，實現了現場的實時控制功能并保證了控制的可靠性。

Horiba CS-151 Conc. Mon., Fiber Optic CS-151F1-0510-QU

5" GSD DISK, 125mm Wafer Process, 1183060C

PLASMOS ELLIPSOMETER, SD2000

BLUE POWER TRANSFORMER, TE3B-150K-GN-NF

Air Products Manifold, Main SG 100 1491-3113-1A

Kensington, Robot WFH4C-TT/SR/HS

White Knight Pump AP300

5" GSD DISK, 125mm Wafer Process, 1183060

Allen-Bradley 10" Panel Color Touchscreen 2711-T10C16

Air Products Chemguard Controller 839-607436

White Knight Pump AP200

Kensington, Robot WFH3C-TT/SR/HS

Air Products 2Cyl AXO-AP1510SM-NH?3 807-470626502A

Edwards QDP80 Dry Pump

Air Products 2Cyl AXO-AP1402TSMA-?WF6 214463

TEL Liner, SIC Low Temp,Pyro, Gate Ox, DS1105

TEL Liner, SIC Low Temp, Pyro Gate Ox, DS1105-200493-1?3

Air Products 2Cyl AXO-AP1510SHM-H?Br,HCl 46635

Kensington, Pre-aligner and Controller

LAM Variable Gap Drive

SEIKO-SEIKI SCU-300H TURBO MOLECULAR PUMP CONTROLLER

Thermo Polysonics Ultrasonic Flowmeter KC-DCT1088

LAM Inner Gate Assembly (Fully refurbished with order)

Used CTI CryoTorr 8F, 8033295 w/ Gate Valve

DATA INSTRUMENTS DATA ACQUISITION SYSTEM, DI-500-16-P

One (1) As-Is Variable Gap Drive for a LAM9600

White Knight AP200 Rebuild Kit RBAP200-1

SEIKO-SEIKI TURBO MOLECULAR PUMP STP-300H

Det-Tronics Dual Spectrum IR flame detector PM-5MPX

USHIO HB-251B/A-AF/HB?-25103BY Lamp Housing & Controller

Allen-Bradley SLC 5/05 16K user memory KC-1747-L551

FALA Industries Centura HP Robot PM Kit H22589

AMAT CTI Cryogenics Cryopump w/ACM, 8116081G006 

SMC Solenoid Pneumatic Harness, Right, CG400 122972

SMC Solenoid Pneumatic Harness, Left, CG400 122935

HUBER UNIPUMP II, NEW IN BOX

Infineion Technologies Valve Control Box KC-VCB

K-PATENTS SENSOR W/10-32 PORT FOR N2 PURGE

Air Products Pigtail for B2H6/N2 cabinet 809-470790604A

K-PATENTS INDICATING TRANSMITTER, IT-RU-GP

KLA Instruments Mass Memory PCB 710-658051-20 REV F0

KLA Instruments Corner Turn PCB 710-655651-20

ESI 100uL Nebulizer ES-2002

GREEN TWEED O-RING, ALD CHEMRAZ, 18.955 ID X 0.275 W

Applied Materials ASSEMBLY, ESC POWER SUPPLY 0010-40239

DNS Robot Assembly For Model 60A, 150mm

HP Semiconductor Parametric Analyzer 4145A

MKS THROTTLING VALVE, 656A-15267

LEYBOLD, CHEMICAL FILTER, NEW, CFS40-65

CERADYNE HEATER ASSEMBLY 200MM TF-101-9-1

Swagelok Process out stick- 809-470313915A

TEL Baffle, Quartz, 1B05-200052-13

INOVA STAGE SHIELD, CLAMPLESS, CLEANED 17-112194-00

Olympus Microscope

CTI Cryogenic Cryo-Torr High Vacuum Pump

SEMITOOL/ FILTER PUMP INDUSTRIES FILTER CHAMBER

MKS Baratron Capacitance Manometer 626A-12319

Air Products Monochrome Display Kit 287-607997

LEICA STEREOZOOM 4

Pentagon Tech Quartz, Bell Jar, Q15-0130

TEL T-CDFVN VOS-40-014 0 IS DIF DS 1187-072378-14

SIEMENS 6ES5242-1AA32 SIMATIC S5

Ushio Control Unit HB-25103BY-C

ASYST INDEXER MASTER CONTROLLER 

LAM Kit, crtsy, cal, te 843-022046-001

LAM KIT, CRTSY, REMOVAL, TUN ESC 843-02246-002

LAM Kit, crtsy, cal, te 843-022046-001 REV B

CPU, PROG. EPROM DC:5/99855-0104?09-007

DYNATRONIX PROGRAMABLE PULSE POWER SUPPLY, 104/1-1-3

LAM RING FOCUS, THIN EDGE, 8' 4428 716-011638-008

Burks Close Coupled Centrifugal Pump

Semitool 50 Wafer Carrierless Rotor

SIMCO Pulse Flow Controller Ionization Kit, 10 Chamber

LEYBOLD ARW6000 ABSORBER

Semitool 50 Wafer Carrierless Rotor

ESI PFA Pure Chamber & PFA cap ES-2100-5472

Air Products Plis Interface Box 0010-30002

Cyonics, LASER POWER SUPPLY 120VAC 2.4AMPS, 2114-20SLK

Olympus BH Microscope

PALL Megaplast G2 w/Chemraz O-Rings PFGF1P12H12

Green Tweed HDP, L-Motion, Bonded SV, 5641A-1282-SC63?9

ENVIRCO PERFORMANCE MACH 10 HEPA FILTER, 69506-018

MRC Eclipse Control Board PCB 884-13-000

PALL TRINITY FILTER HOUSING 25UPS1G, 4HD4886-2316

BRUSHLESS DC MOTOR SERVO, RATIO 1/80 T61105-59

NT INTERNATIONAL TRANSDUCER ACID 1/2 FLR 0-60 PSI 4210-

EUROTHERM POWER SUPPLY, 661/01/00

Swagelok Process out stick 809-470314915A

APPLIED MATERIALS ION / TC BOX CONTROLLER, 01-81911-00

LAM ASSY, PCB, ADIO - AO, 810-017031-004

Leitz Wetzlar PL Fluotar 50x/0.85 567013

GRANITE MICROSYSTEMS COMPUTER, 1 GHZ, 256M RAM

FURON VALVE 3-WAY PNEUMATIC MOB3-122HP

Entegris Pressure Transducer 41501-110G-F04-?B12-A-S3

Entegris 1" PFA Hand Valve, DS16-2ML-16F

Semitool 200MM End Effector Stiffen Style

SIMCO Ionization Kit 4009012

SIMCO Ionization Kit 4008899

Fortrend Model F8225 Wafer Transfer Unit

Microvision MVT 1080 Wafer Inspection Station, used

Acopian DC Power Supply A75HT560 MRC Eclipse Star

DNS Hot Plate Assembly For Model 60A, 150mm

CUTLER-HAMMER CIRCUIT BREAKER, HFD3175L

D SQUARED TRANSFORMER, 45T3HFI5NLP

BLOWER In Great Condition

Front End Load Port

MICROPUMP HEAD L15368, 2170/56C 

USHIO UV LAMP SUV-2002NIL

USHIO UV LAMP SUV-2011NI

White Knight AP-200 Pump Rebuild Tool Set KC-AP20-170

Schumacher ELOI Overlay, 1495-3174 

Air Products, Spill alarm cable assembly, 2103-3615

AXIOMTEK COMPUTER ASSEMBLY BOARD SBC8360/ 73300-33

FUJI CIRCUIT BREAKER 150A 3PL GFI ELB EG203B

Mykrolis Stainless Steel Filter Housing KC-YY55P8000

HYTEC FLOW SYSTEMS ULTRAPURE HEAT EXCHANGER HFS-062/3

BALZERS QUARTZ GLASS MANTEL, BK221252

Air Products Cable Assembly Spill Detector 2103-0397

Applied Materials 0020-89990

NESLAB CHILLER, MODEL FTC-350A

NT INTERNATIONAL TRANSDUCER PRESSURE FLOW THRU 3/4"

Immersion Heater 4.8KW 208V 8.83X8.83 W/O TOP670217JS

Tosoh Honeywell Endura 5500 Target

SEMITOOL LINEAR RAIL ENCODER TAPE 62.75" T73311-02-0627

Swagelok Gas Hard Line Pigtail 1/2" FVCR 1495-3154A

Schumacher, Mother controller board, 1730-3005

Pneutronics Interface System

Air Products Pigtail Outlet, 1/4in MCVR 1495-3104A

KLA Instruments X-Interpolator PCB 710-658177-20 Rev C0

KLA Instruments Y-Interpolator C Ph. 3 710-658172-20

KLA Instruments X-Interpollator Ph. 3 710-658177-20

KLA Instruments Y-Interpolator C Ph. 3 710-658172-20

KLA Instruments Interface 1 Ph 3 710-658086-20 Rev E0

TEL Tokyo Electronics Cup 11851250-001

Semitool Rotor Kit PMR0333-01

MASTR III AUXILIARY RECEIVER

FLUKE 8500A DIGITAL MULTIMETER

KLA Inst Memory Controller Assy Ph 3 710-658232-00

SENSARRAY PROCESS PROBE WAFER, 1501A-8-0425

EUROTHERM POWER SUPPLY, 661-01-00

Semitool Rear Bowl Seal

Kalrez Rear Bowl Seal 4079

Mykrolis FIlter Microgard UPX .05um 10" CWUZ01P01

SensArray Corporation K-TYPE TC WAFER REFLOW 1630A-8-00

Fujikin Inc. 3/4 Auto Valve Stainless N.C. KC-FPR-71-19

Pentagon Tech Exclusion Ring, DC10046

GREEN TWEED o-ring, barrel 8528002139SD653

KLA Instruments Processor PCB 710-658046-00

KLA Instruments Defect Processor Phase 3 710-658076-20

PROCESS TECHNOLOGIES HEATER IMERSION KIT, HXOL4205CX

KLA Inst. Alignment Processor (API) Ph. 3 710-658036-20

PHOENIX CONTACT INTERBUS-S IBS 24 DI/32

Applied Materials Shield, Low Knee, AL/TI, 0020-28615

Horiba Stec Mass Flow System, SEC-500

Applied Materials 0100-35148 

FUJI CIRCUIT BREAKER 100A 3PL EG103F

SEMITOOL POWER SUPPLY LOGIC 85-265/5 +12 100W 73147-18

Tokyo Seimitsu Board, Digital Divider, 294075

KLA Instruments Defect Filter PCB 710-659724-00 Rev C0

SERFILCO VERTICAL CENTRIFUGAL PUMP, OL100VPF-PEO

KLA Instruments DD Assembly PCB 710-650044-20 Rev C4

Tosoh Endura 5500 Target, 4029H-13-109-50?1

EUROTHERM AC SERVOMOTOR S102VN0440MQ10-?EL5

DAIFUKU DRIVER(TFE) ORIENTAL

LAM RING, CERAMIC FILLER - LAM

RORZE CORPORATION CONTROLLER, SEMIX MICRO COMPUTER

APPLIED MATERIALS INC.QUARTZ SHILED 125mm 

ADVANCED MOTOR CONTROLS/AMPLIF?IED MOTOR CONTR. B15A8F

STEPPER MOTOR 5PHASE 0.02DEG/STEP by Vexta

Fiberguide Probe Low Light CB12120

SensArrayThermo?couple Process Probe Instr. Waffer

XYCARB CERAMICS RING, EXTERNAL QTZ 8" 0200-09222

CUTLER-HAMMER INDUSTRIAL CIRCUIT BREAKER, HFD3045L

Brooks Model S600-17 Robot

LAM Dual Bras Heat Exchanger, 2600568

LAM RING, HOT EDGE 6" 716-140163-001

SDI Model PDM-40a Control Box

APPLIED MATERIALS SUPPORT BAR, CATHODE DIAM. 16.5

DAIFUKU CO. LTD BOARD (MCP) DIAFUKU R.C. (S/R)

Watlow Columbia 11" FUSED HEATER BLANKET, F11211286A

THK SLIDE HORIZONTAL LOAD/UNLOAD 300mm, GL15S16+400L

EMOTEQ BLDC MOTOR AMPLIFIER, QB02300-T04-HBE

MKS MANOMETER, 124A-11465

HUTTINGER MASTER OSCILLATOR, MOP 2/13560

MKS MANOMETER, 0-1000, 128AA

LEYBOLD SYNCH MODULE FOR OMS3000 

NSK LEAD SCREW BALL MINIMAG, W1203FA-3P-C5Z1?0 

LAM RING, Coupling, ESC 8", JDA w/ Ceramic Ring 

CGI, INC. GEARBOX, 10:1, 90 DEGREES, 23RN0100

Allen-Bradley 32-Channel Digital I/O Module SLC 500

Wafer Paddle, 398-19599-1

Wafer Paddle, 398-19335-1

KLA Instruments Alignment Processor Ph. 3 710-658041-20

Raytek Infrared Sensor with 10:1 Optics RAYMIC10LT

Air Products AP2 Front Panel Display Board 809-607056

KLA Instruments DF Assembly PCB 710-658086-20 Rev E0

Leica ∞/- PL Fluotar optics 10x/0.25 567050

Entegris 1/2" Pressure Transducer single port 

NT INTERNATIONAL TRANSDUCER ACID 1/2"

PROPORTION AIR VALVE CONTROL SERVO SBNK PA72099-27

EUROTHERM AMPSTACK, 70A240N14-20MA

MKS MANOMETER, 10 TORR, 1/4 VCR, 223B-11463

Watlow Columbia Heater Blanket 14030089

Chem-flo Equipment, Inc Shuttle Assembly CP20-250

LAM/ BAY ADVANCED CYLINDER LIFTER 853-011661-001

BALDORMOTOR, B2HP, 3450 RPM, 2080V, CYOR35551

MAC Valves SOLENOID VALVE 5 3 WAY VALVES 20S CO11100120

Schumacher EMO Controller board 1730-3006 Rev. H

Allen-Bradley 32 Point Sourcing Input Card KC-1746-IB32

SEMITOOL MOTOR BRUSHLESS CENTURIUM 8" LEADS, 17410-40

Item title
Mykrolis Filter Intercept 0.2um, 10" IHAG01P01K

Vero Power Supply, New, PK-120

MILLIPORE 10" FILTER CARTRIDGE, CTFA01P01

MILLIPORE 10" FILTER CARTRIDGE, CTFA01P01

MILLIPORE 10" FILTER CARTRIDGE, CTFA01P01

APPLIED MATERIALS GAS DISTRIBUTION PLATE, 0020-31488

Asys Process Handler, ARO-140-AB-AB

Applied Materials 0020-84744

OPTICAL ENCODERS MOTOR FOUP DOOR ELEV WITH BRAKE 

BALZERS MB-515V MAGNETIC SYSTEM, BK221940-T

APPLIED MATERIALS RING,CAPTURE,CE?RAMIC,145MM 0200-35350

MKS MANOMETER, 124A-11465

MAC Valves SOLENOID Bank 3 way VALVE 34B-L00-GDCA-1K?X

DEUTSCHE STAR LEAD SCREW BALL MINIMAG, 1532-4-9201 

Air Products Surge Protection Kit w/base 809-607198

Applied Materials 0040-96353 Gas Line Valves