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3HAC026101-001

3HAC026101-001

3HAC026101-001

3HAC026101-001

基于OPC過程控制系統結構采用客戶/服務器模式，通常把符合OPC規范的設備驅動程序稱為OPC服務器，而將符合OPC規范的應用軟件統稱為OPC客戶。服務器充當客戶與硬件設備之間的橋梁，客戶對硬件設備的數據讀寫操作由服務器代理完成，客戶不需要同硬件設備直接打交道，或者說客戶是獨立于設備的（即不管現場設備以何種形式存在，客戶都以統一的方式去訪問）。在客戶端和服務器端各自定義了統一的標準“接口”，接口具有不變特性，OPC所提供的接口標準事實上是一種“軟件接口標準”或“軟件總線”，它明確定義了客戶同服務器之間的通信機制，是連接客戶同服務器的橋梁和紐帶。這樣，我們可以自由選擇最符合我們實際要求的軟、硬件產品，然后將它們像“搭積木”一樣組合在一起進行無縫地工作，這一切都來源于OPC所提供的強大互操作性的特點，對此我們可以作一個形象的比喻：盡管家用電器的種類繁多，但它們的電源插頭與插座卻是統一的。可以這樣說，統一的標準接口是OPC的實質和靈魂。
類似于工業組態軟件中的相關概念，OPC規范主要定義了數據訪問規范、報警和事件處理規范及歷史數據訪問規范三部分，對應于每種規范可以實現相應的OPC服務器。OPC數據訪問服務器在結構上由服務器（Server）、組（Group）和項（Item）三級對象組成。在邏輯關系上，上一級對象是下一級對象的父對象，下一級對象則是上一級對象的子對象，OPC數據訪問服務器正是通過這種“集合”的概念來組織和管理其內部結構的。項對象作為結構層次中最基本的單元直接對應著物理硬件設備的某個具體數據單元，項對象作為物理數據的存儲載體，主要包含數據值（當前設備單元中的數據）、時間標簽（當前采集到的數據時間定位）和品質信息（當前采集到的數據可靠程度）等信息。
客戶對硬件設備的數據讀寫操作分為同步和異步兩種方式。同步方式適合于發送、接收數據量較少的場合；相比同步方式，異步方式占用較少的資源，效率更高，適合大數據量的場合，在實際中的應用也更為廣泛。在沒有開發出OPC標準之前，異步方式的存取是不可能的，會導致存取沖突的發生。

ETEL DSB2P123-111E-000H

SMC  CXSM25-80-Z73L

SMC CXSM25-100-Z73L

Intel  451548-003 W/09-04433

Critec Erico TDX100C 277/480 

HP Agilent 5517D Laser Head C16

Blue M Oven POM-336E-1 W/CIRCULAR RECORDER

Numatics Cylinder 1500DC2-15A

Numatics Cylinder 1500DC2-09A

Numatics Cylinder 1500DC2-08A-04

Motor Baugrobe 4300 Version 2.2

Voltage Regulator & Lamp Control Module 095-0508 

New HSH1500CIEO HSH 1500 CIEO Replaces HBO1500W/CIEL

Osram HBO 100 W/2

Ultratech item 0180502-3-01 PHD Inc.

Ushio USH-102DH 

Qualiflow Valve FNOM2HF

ASM 50-125108A24 MKS 153D-2-50-2 

Brooks Instruments Sho-Rate 1355DA1G1BAA

Brooks Instruments Sho-Rate 1370CB1C2EAS 

Dwyer RMA-84-SSV 4-40 GPH 

Micro Memory Inc. MM-6200 Rev. K

CT 170P001671 I/O Board

CT 170P001664 ADC/MCS Micro Board

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ASML/SVG 4022.455.48161 W-F-V-6

ASML/SVG 4022.455.48171 W-F-9-6

ASML/SVG 4022.436.4492

ASML/SVG 4022.437.2886

ASML/SVG 4022.456.07242 8

 T.E.M Gas filter No. TEM-813-6S

VAT Pneumatic Rectangular Gate Valve F02-76569-01

Keyence LX2-V10W Controller Laser Thrubeam Sensor

Keyence Corp. LX2-12 Laser Thrubeam Sensor Head

Unit Instruments UFC-1100A Mass Flow Controller N2

Unit Instruments UFC-1100A Mass Flow Controller N2

Unit 1660 UFC-1660 Mass Flow Controller Rebuilt

Aera FC-D980C Mass Flow Controller 500 SCCM SIH4

Aera FC-D980C Mass Flow Controller -4 Multi Gas

UFC-2050A Unit Instruments Mass Flow Controller N2

Unit Instruments UFC-8100 Mass Flow Controller N2

Vernier Software Heart Rate Monitor HRM-DIN

HSH1500CILO HSH 1500 CILO Lamp

Automated Production Systems Inc.GC12 Tape Marker

DOT Two Thornton DI Resistivity Monitor SPT-109

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ASML/SVG 851-8877-002C Perkin-Elmer Assy A1302

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ASML/SVG 859-0929-006A Stage Decoupling/Over Current

ASML/SVG 859-0984-002A Current Drive Board

ASML/SVG 859-0984-002C Current Drive Board

ASML 4022.436.5024 SVG

BV6-8F Entegris (Fluoroware) Magnaflo Plug Valve 2-way

Furon Valve 3 way UPM3-F812-MT 3/4" Flare Ports

Lam Research Box RF Switch 853-017163-001-D-C221

AP Tech Valve AP3625S 2PW FV4 FV4

VAT Pneumatic Rectangular Gate Valve F02-56927/38

Veriflo Valve IR401W-2P-FS-MF

AMAT Applied Materials Mainframe Module 5000 Etch.

Nikon Motorized Stage With 2  Chuck

WG3D205R2 Entegris/Mykrolis FV-50K Diffuser

 Entegris/Mykrolis/Millipore WG3NS2RR2

Entegris/Mykrolis WG3D40DR2 FV-40K Diffuser

Entegris/Millipore WGPMSURR2 Unigard Filter

Unit UFM-1100 Mass Flow Controller HE 3 SLM

Unit UFC-1100A Mass Flow Controller HE 1.5 SLM

Unit UFC-1100 Mass Flow Controller NF3 500 SCCM

AP Tech Valve AP3550SZ 2PW FV4 FV4

AP Tech AP3625SXK 4PWN FV4 MV4 FV4 MV4

AP Tech AP1002SXK 3PW MV4 MV4 V3

National Instruments P/N 182801A-002 MXI2-1 2 m Cable

ASML/SVG PAAC 450/20 Power Supply Module 4022.471.7669

Tokyo Electron Track AC Power Box Cabinet PB122-U300-02

Semi Gas Purge System Argon Gas Handling Safety System 

Advanced Radiation Corp. 350 Watt Short ARC Lamp.

Canon Stepper Lens Part KB-02

Semi Gas System TEOS Manufactured for Advanced Delivery

AMAT Part 0100-90286 Applied Material Beam Profiler

AMAT Part Number 0100-00828 Applied Material Vibration

AMAT Part Number 0100-00860 Beam Stability Monitor

AMAT Part Number 0100-00929 I/V Converter-Beam Profile

AMAT Part Number 0100-90025 24V 1A Power Supply

AMAT Part Number 0100-90970 Beam-Profiler Micro Control

AMAT Part Number 0100-91105 I/V Converter Power Supply

High Vacuum Appartus Valve 922-0009

VAT Pneumatic Rectangular Gate Valve F02-57454-02

VAT Pneumatic Rectangular Gate Valve F02-58413-03

Emission Technology Combustion Catalyst System 80160/DC

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Global Navigation GNS-500A CRT/CDU VLF Omega 11600-6

Digi 8-port RJ45 I/O box PN 50000010

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Unit UFC-1100A Mass Flow Controller N2 500 SCCM

Unit UFC-1100A Mass Flow Controller N2 20 SCCM

Unit UFC-1100 Mass Flow Controller CL2 200 SCCM

Tylan Mass Flow Controller FC-280SAKZ N2 Model FC-280S

Tylan 2900 Series Mass Flow Controller FC-2950M-EP

Tylan 2900 Series Mass Flow Controller FC-2900MEP HCL

Meridian Laboratory MX-5/ASM 44-121130A02

New ASM Kit-Internal Assy-4.00 PNEU Valve 50-110109A67

ASML/SVG 4022.454.59231 Beam Steering Fixed Mirror

ASML/SVG 4022.486.04192 ATWT HALB MAGNET PLATE CAS TP

Semiconductor Systems 09-04352 PB 146298 (2) 09-04396-B

Semiconductor Systems 09-04352,PB 146298,09-04393?-B Bo

Unit Instruments Mass Flow Controller UFC-1000 N2 5 SLM

Unit Instruments Mass Flow Controller UTS-1100 N2 10L

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SMC EVZ512M SOLENOID VALVE (5)

Logical Device, Inc. HC705 Device Programming Adaptor

Gas Analyzer GOW-MAC Instrument Co. Model 24-520-1C

Duffers Associates Inc. Current Analyzer DSI 8100

New ASM 65-106645A24 MKS PRD-C-2C Meter-Digital Readout

ASM C000906A Fujikin FPR-SD-71-6.35-2 Pneumatic Valve

ASML 4022.436.2492 Demo Align. Module board SVG

ASML 4022.437.0198 Power Amplifier Module SVG

ASML 4022.437.2993 8 Channel Fiber Optics card SVG

ASML/SVG Agilent Z4203B HPLR Laser

CT 170P001674 BIAS/UZ-PP Board

Global-Wulfsberg Systems Color CDU GNS-X

SMC Cylinder CDQ2WB125C-UIA950045

GEMU CleanStar C60 8D75305A2HPW Series Ultra Pure

FURON PV1-66 Tef Plug VLV

AMAT Part Number 0090-90966 daq Mkll Type B

AMAT Part Number 0100-90870 4 Phase Stepper Controller

AMAT Part Number 9090-00889ITL daq Scan Efficiency

ASML/SVG Jenoptik Jena Lens Lot of 8 

ASML/SVG 865-8009-001-B Stage Decoupling/Over Current

ASML/SVG 859-0984-004A

ASML/SVG 859-0984-002A

ASML/SVG 859-0928-007A A1304/A1305

CTI-Cryogenics Gas Heater 8044051/Purge pump 8044047

Faulhaber DC Motor 3557K024

KNF Flodos PLM 1246-ND 300

Motor with Decoder

Schmersal AZ1602YP Switch Solenoid latching safety

Dual Cassette Robot Loader

Furon HPV2-144NC Valve

Extraction Sub Assy Filterbox ES1001894-03/ULPA

 ASML 4022.481.99503 

ASML 4022.481.70364 

ASML/SVG 4022.435.05718 8” Wafertable

ASML/SVG 4022.437.0315 AligNm Laser C. Module

Swagelok SS-BNV51-C Bellows-Sealed Valve Nupro

ASML/SVG Module 4022.437.1996

Swagelok 316L-4-VCO-3A (25) Valve Fitting Cajon

Swagelok Cajon SS-4CA-VCR-50 Poppet Check Valve 

Swagelok SS-2-HC-1-4 Hose Connector  x 1/8” (25)

Swagelok SS-4-VCR-1-00039 316 SS VCR Face Seal Fitting

Swagelok SS-45S8 Ball Valve NO HANDLE Whitey

KLA Tencore VME Modified 740-760202-00 Rev. A4

Imaging Tech OFG-VP1100 Frame Grabber

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ASM 50-123824A25 VAT 26328-KA01-0002/3203 

ASM 50-123824A26 VAT 26328-KA11-0001/0890 

ASM 50-123824A26 VAT 26328-KA11-0001/1160

Adept 10300-15400 

Adept Tech Control Module 10300-15100 Amplifier A-Type

Varian IIS E11029470 Rev 6

Integrated Flow System Inc. SR4-120-6T-3XX3-S10-80/10

Del Electronics Corp. B4425 

New Filterite DFN 30-20AN 276 Tokyo Electron 53-0140-0

Varian 951-5091 

Whitey/Swaglok SS-43VCR4 2 

ASML 4022.470.0166 Two Maxon Motor Gears SVG

ASML 4022.455.82561 Zeiss filter 3668/700 Stepper 8323 

ASML 4022 481 05757/05767 LS LM LAMP ASSY bulb lot 39

Varian 941-6501 VACSORB Sorption Pump with heater

Nor-Cal ESVP-300 valve

 Koyo PLC Direct Logic Programable logic Control

 Condor Power Supply Model MPS-140

SVG/ASML 859-0534-005 Robitech Inc. Solenoide 990-9024

CT 170P001670 Mother Board

Proteus Industries Inc. 100C Fluid Flow Switch

Dayton 1/6 HP 3K479B 

VAT Pneumatic Rectangular Gate Valve F02-53154-11

VAT Pneumatic Rectangular Gate Valve F02-56927-05

VAT Pneumatic Rectangular Gate Valve F02-56927-07

VAT Pneumatic Rectangular Gate Valve F02-56927-14

VAT Pneumatic Rectangular Gate Valve F02-56927-18

URS Corporation ASC Board 228-4-004 Rev. A

URS Corporation ASC Board 1-00003

Moore Research Center Encoder/Sensor input 3082 Rev. B

Telesciences 700195-02/Motor?ola MVME 167-03B

MegaTest PWA 111308 Rev 14 PWB 111309 Rev 2 APG Rev. 14

Thomas Compressors & Vacuum Pumps 2107BEFS18-320B

Go Inc. CPR1-108937 0-100 psig 5/96

ASML/SVG 879-0352-006 Lithography System Inc

ASML/SVG 4022.477.4843 CCM Elev. Break Override Switch

ASML/SVG 4022.437.32691 TEAC FD-235HFC891

Lam Research 663-091342-001 Battery Controller

Leybold-Heraeus NIZ 2 Power Supply

Osram Sylvania Air Heater 014372 1,000 Watt New

Varian MAT 25649/039 Power Supply

Edwards GVI 100P 

30 gallon Flammable Cabinet PWT-SMT-C10

Lyon Metal Productions 5445 45 Gallon Storage Cabinet

Parker Valve 3/4” Check CV-1-661212

ASML/SVG A1300 Power I/O 865-8025-001-02

CSA Wireless Tilt Mount for 65 and 85 PCSX Antennas XSL

MKS Type 652 Exhaust Throttle Valve Controller 652B

Dwyer Minihelic Pressure Indicating Transmitter 604D-0

New Tescom Industrial Controls 44-1121-24 303 Stainless

ASML 4022.435.24391 Lithography Vacuum Output Sensor

ASML 4022.502.26008 New Shutter Blade Assy SVG

ASML 4022.436.7961 SVG 12NC.15.11.00

ASML 4022.436.7960 Z436A CMG SVG Switch Assy.

ASML 8122.389.1501.3 Focus Module

ASML 4022.436.6768 SVG

ASML 4022.438.42615 14 Halogen lamps 12v/100W SVG

NEC-16 T board

Intel Top Assy 165151-005

NEC-16 board

Intel Assy 4002695-04 PWA 1002494-007R

ASML 4022.471.8361 S31 Module Card SVG

ASML 4022.471.7409 Module Card ID W2R/WSE 4 SVG

ASML 4022.480.62691 Lithography Vacuum Output Sensor 

ASML 4022.471.5043 Module Card SVG

ASML 4022.430.1445 Module Board SVG

ASML 4022.437.1808 LEV. Control Board SVG

ASML 4022.430.0478 Shutter Control board SVG

ASML 4022.471.7407 Module Card ID WC1R/WSM 3 SVG

Jennings UCS-300-15S Vacuum Capacitor CVDD-300-15S

Mega Lightning PCI PC-602167-R3 Color Graphic

RomMax Rev 1.5 E.E. Tools Inc 069717

Applied Materials Water cooled RF Coil (2) AMAT